NEGATIVE PHOTORESIST COMPOSITIONS AND PROCESSES FOR PREPARING THERMALLY STABLE, NEGATIVE IMAGES USING THEM

申请公布号：EP0232972(B1)

申请号：EP19870300219

申请日期：1987.01.12

申请公布日期：1993.09.08

申请人：

ROHM AND HAAS COMPANY

发明人：FEELY, WAYNE EDMUND

分类号：G03F7/029;G03F7/004;G03F7/038;G03F7/38;G03F7/40;H01L21/027

主分类号：G03F7/029

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