METHOD AND APPARATUS FOR CONTACTLESSLY ADVANCING SUBSTRATES,申请号EP20110736180-传众专利搜索

METHOD AND APPARATUS FOR CONTACTLESSLY ADVANCING SUBSTRATES

申请公布号：EP2591141(B1)

申请号：EP20110736180

申请日期：2011.07.06

申请公布日期：2017.04.05

申请人：

ASM International N.V.

发明人：GRANNEMAN, Ernst, Hendrik, August;KUZNETSOV, Vladimir

分类号：C23C16/54;B65G49/06;B65G51/02;B65G51/03;C03B35/24;C23C16/44;C23C16/455;H01L21/677

主分类号：C23C16/54

摘要：A method of contactlessly advancing a substrate (140), comprising: -providing a process tunnel (102), extending in a longitudinal direction and bounded by at least a first (120) and a second (134) wall; -providing first and second gas bearings (124, 134) by providing substantially laterally flowing gas alongside the first and second walls respectively; -bringing about a first longitudinal division of the process tunnel into a plurality of pressure segments (116), wherein the gas bearings (124, 34) in a pressure segment have an average gas pressure that is different from an average gas pressure of the gas bearings in an adjacent pressure segment; -providing a substrate (140) in between the first wall (120) and the second wall (130); and 1-allowing differences in average gas pressure between adjacent pressure segments (116) to drive the substrate along the longitudinal direction of the process tunnel.