TECHNIQUES AND APPARATUS FOR MANIPULATING AN ION BEAM,申请号WO2016US48614-传众专利搜索

TECHNIQUES AND APPARATUS FOR MANIPULATING AN ION BEAM

申请公布号：WO2017044312(A1)

申请号：WO2016US48614

申请日期：2016.08.25

申请公布日期：2017.03.16

申请人：

VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

发明人：BUFF, James S.;BENVENISTE, Victor;SINCLAIR, Frank

分类号：H01J37/14;H01J37/141;H01J37/147;H01J37/317

主分类号：H01J37/14

摘要：A method may include: generating an ion beam from an ion source, the ion beam having an initial direction of propagation; deflecting the ion beam at an initial angle of inclination with respect to the initial direction of propagation; passing the ion beam through an aperture in a magnetic assembly; and generating in the aperture, a quadrupole field extending along a first direction perpendicular to the initial direction of propagation of the ion beam, and a dipole field extending along a second direction perpendicular to the first direction and the initial direction of propagation.