SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATION OF METROLOGY TOOLS,申请号WO2016US46939-传众专利搜索

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATION OF METROLOGY TOOLS

申请公布号：WO2017031014(A1)

申请号：WO2016US46939

申请日期：2016.08.13

申请公布日期：2017.02.23

申请人：

KLA-TENCOR CORPORATION

发明人：PANDEV, Stilian;SANKO, Dimitry

分类号：G01N21/95;G01N35/00;G06F17/50

主分类号：G01N21/95

摘要：A system, method and computer program product are provided for calibrating metrology tools. One or more design-of-experiments wafers is received for calibrating a metrology tool. A set of signals is collected by measuring the one or more wafers utilizing the metrology tool. A first transformation is determined to convert the set of signals to components, and a second transformation is determined to convert a set of reference signals to reference components. The set of reference signals is collected by measuring the one or more wafers utilizing a well-calibrated reference tool. A model is trained based on the reference components that maps the components to converted components, and the model, first transformation, and second transformation are stored in a memory associated with the metrology tool.