積層薄膜構造体の製造方法、積層薄膜構造体及びそれを備えた圧電素子

申请公布号：JP2017017211(A)

申请号：JP20150133333

申请日期：2015.07.02

申请公布日期：2017.01.19

申请人：

富士フイルム株式会社

发明人：直野 崇幸;佐野 貴洋

分类号：H01L41/316;H01L41/09;H01L41/187;H02N2/00

主分类号：H01L41/316

摘要：【課題】Ｐｂ含有ペロブスカイト型酸化物膜よりも熱膨張係数の小さい振動板の両面にクラックのないＰｂ含有ペロブスカイト型酸化物膜を備えた積層構造体とその製造方法及び圧電素子を提供する。【解決手段】振動板１０の両面に下部電極膜２１，２２を成膜し、下部電極膜２１の表面に振動板１０より熱膨張係数が大きい柱状構造を有する第１のＰｂ含有ペロブスカイト型酸化物膜３１を直接成膜する第１の積層工程と、下部電極膜２２の表面に第２のＰｂ含有ペロブスカイト型酸化物膜３２を直接成膜する第２の積層工程とを順次実施する。第２のＰｂ含有ペロブスカイト型酸化物膜の成膜は、第２の積層工程後の第１のＰｂ含有ペロブスカイト型酸化物膜３１中のＰｂのＢサイト元素に対するモル比ＲＡ１と、第２のＰｂ含有ペロブスカイト型酸化物膜３２中の同モル比ＲＢ１との差が０．０５６以下となる条件で実施する。【選択図】図１

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