PROCESS FOR CONVERTING SILICON TETRACHLORIDE TO TRICHLOROSILANE,申请号CA20132836964-传众专利搜索

PROCESS FOR CONVERTING SILICON TETRACHLORIDE TO TRICHLOROSILANE

申请公布号：CA2836964(C)

申请号：CA20132836964

申请日期：2013.12.18

申请公布日期：2016.05.31

申请人：

WACKER CHEMIE AG

发明人：KNOTH, JENS FELIX;EBERLE, HANS-JUERGEN;RUEDINGER, CHRISTOPH

分类号：C01B33/107

主分类号：C01B33/107

摘要：The invention relates to a process for converting STC to TCS, by introducing reactant gas comprising STC and hydrogen into a reaction zone of a reactor in which the temperature is 1000-1600°C, wherein the reaction zone is heated by a heater located outside the reaction zone and the product gas comprising TCS which forms is then cooled, with the proviso that it is cooled to a temperature of 700-900°C within 0.1-35 ms, wherein the reactant gas is heated by the product gas by means of a heat exchanger working in countercurrent, wherein reactor and heat exchanger form a single, gas-tight component, wherein the component consists of one or more ceramic materials selected from the group consisting of silicon carbide, silicon nitride, graphite, SiC-coated graphite and quartz glass.