Cleaning apparatus and associated low pressure chamber apparatus.

申请公布号：NL2014602(A)

申请号：NL20152014602

申请日期：2015.04.09

申请公布日期：2016.03.31

申请人：

ASML NETHERLANDS B.V.

发明人：FREEK MOLKENBOER;JEREMY BURKE;WILHELM CLAUSSEN;ALEXANDER FRANCISCUS DEUTZ;JERRY DON HODO;CORNELIA ELIZABETH CAROLINA HULSBOSCH-DAM;EDWIN TE SLIGTE;MAYK VAN DEN HURK

分类号：G03F7/20;B08B3/08

主分类号：G03F7/20

摘要：Disclosed is a cleaning apparatus configured to clean a radiation transmission assembly (such as a viewport), or part thereof. The radiation transmission assembly provides for radiation transmission to and/or from a low pressure chamber. The cleaning apparatus comprises, a hydrogen radical generator configured to generate hydrogen radicals for use in cleaning said radiation transmission assembly or part thereof, and a connection assembly for connection to said radiation transmission assembly.

DISPOSITIF SEMI-CONDUCTEUR MUNI D'UN DISSIPATEUR THERMIQUE

NOUVEAU PROCEDE DE PREPARATION DE 2-TRIFLUORO-METHOXY-ANILINE

Closing device for a ventilation channel, notably a fire-break or anti-smoke valve

I.c. engine exhaust system particle trap

PROCEDE POUR LA DETECTION DU POINT OU DE L'INSTANT D'IMPACT D'UN PROJECTILE

INSTALLATION ET PROCEDE POUR DETERMINER LE NIVEAU ET LA DENSITE D'UN LIQUIDE DANS UNE CUVE, AU MOYEN D'UNE SEULE CANNE DE BULLAGE IMMERGEE

PROCEDE DE PREPARATION D'UNE SOLUTION ULTRA-PURE DE PEROXYDE D'HYDROGENE PAR ECHANGE IONIQUE EN PRESENCE D'IONS ACETATE

EMBRAYAGE A FRICTION COMPRENANT UN DIAPHRAGME ATTELE AU COUVERCLE PAR DES COLONNETTES ET SOUS-ENSEMBLE POUR UN TEL EMBRAYAGE

BACTERIES MULTIRESISTANTES, PROCEDES D'OBTENTION ET UTILISATION

DISPOSITIF D'OUVERTURE A CREMAILLERE A DESALIGNEMENT POSSIBLE

ETAGE DE ROTOR DE TURBOMACHINE RENFORCE PAR DES FIBRES

ELECTRON BEAM LITHOGRAPHY DEVICE AND METHOD

IMAGE FORMING DEVICE

FACSIMILE EQUIPMENT

LIQUID GRANTING DEVICE AND IMAGE HOLDER RECOVERING DEVICE

THREE-DIMENSIONAL SHAPE MEASURING APPARATUS AND Z-AXIS STAGE IN THREE-DIMENSIONAL SHAPE MEASURING APPARATUS

FLYWHEEL

MAGNETORESISTANCE EFFECT ELEMENT AND MANUFACTURE THEREOF

PROCEDE ET APPAREILLAGE POUR COMMANDER UN EMBRAYAGE

Reinforced elastomer joint, esp for use as glazing seal in buildings or transport