窒化珪素質焼結体および加熱装置ならびに吸着装置

申请公布号：JP5894288(B2)

申请号：JP20140538647

申请日期：2013.09.27

申请公布日期：2016.03.23

申请人：

京セラ株式会社

发明人：大田 瑞穂;石川 和洋;織田 武廣

分类号：C04B35/584;C04B35/591

主分类号：C04B35/584

摘要：[Object] To provide a silicon nitride sintered compact, a heating device and an adsorption device of which thermal conductivities are high. [Solution] A silicon nitride sintered compact of the present invention includes a silicon nitride crystal, an MgRE 4 Si 3 O 13 crystal (RE is a rare earth element), and an REMgSi 2 O 5 N crystal, and thus, has high thermal conductivity. Moreover, a heating device including a protective tube which is made up of the silicon nitride sintered compact, is capable of efficiently transmitting heat of a heater. Furthermore, an adsorption device including an adsorption member which is made up of the silicon nitride sintered compact, is capable of efficiently dissipating heat of an adsorbed body.

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