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エキシマランプ

申请公布号:JP5888256(B2)

申请号:JP20130021258

申请日期:2013.02.06

申请公布日期:2016.03.16

申请人:
ウシオ電機株式会社

发明人:朝山 淳哉;谷野 賢二;田川 幸治

分类号:H01J65/00

主分类号:H01J65/00

摘要:The present invention provides an excimer lamp which radiates ultraviolet rays by inducing excimer to discharge in a discharge container, can suppress generation of ozone and radiate ultraviolet light useful for sterilization and plays a superior starting characteristic. The excimer lamp is provided with a long size discharge container, an end head part formed by protruding from one end part of the discharge container, and a seal part formed at the other end part of the discharge container. An internal electrode arranged in the discharge container and an external electrode arranged out of the discharge container are used as a pair of electrodes, excimer illuminating gas is sealed in the discharge container. The excimer lamp is characterized in that a phosphor enabling the ultraviolet rays to light is arranged on the inner wall of the discharge container; the internal electrode extends along a tube axis of the discharge container; one end of the internal electrode is guided in the end head part; the other end of the internal electrode is embedded in the seal part; and the external electrode extends continuously from the discharge container and is arranged at the end head part.

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