Substrate processing apparatus and substrate processing method,申请号US201214233496-传众专利搜索

Substrate processing apparatus and substrate processing method

申请公布号：US9266153(B2)

申请号：US201214233496

申请日期：2012.10.16

申请公布日期：2016.02.23

申请人：

Tokyo Electron Limited

发明人：Nagamine Shuichi;Hashimoto Yusuke

分类号：B08B3/00;B08B3/04;H01L21/67;H01L21/677;H01L21/687;H01L21/311

主分类号：B08B3/00

代理机构：

Burr & Brown, PLLC

代理人：Burr & Brown, PLLC

地址：Minato-Ku JP

摘要：A substrate processing apparatus includes: a storage tank configured to store a liquid; a substrate support unit configured to rotatably, horizontally support a substrate; and a plate driving unit configured to move the substrate support unit between an immersion position at which the substrate is immersed into the liquid stored in the storage tank, and a separation position located above the immersion position, at which the substrate is separated from the liquid stored in the storage tank. The substrate processing apparatus also includes a rotary drive unit configured to rotate the substrate supported by the substrate support unit, and liquid supply units configured to supply a liquid to the substrate that is being rotated by the rotary drive unit in the separation position.

主权项：1. A substrate processing apparatus comprising: a substrate support unit configured to rotatably, horizontally support a substrate; a storage-member bottom unit and a storage-member flood gate unit, the storage-member bottom unit being disposed below the substrate support unit, and the storage-member floodgate unit surrounding the storage-member bottom unit, the storage-member bottom unit and the storage-member floodgate unit being relatively movable in a vertical direction to take a first positional relationship and a second positional relationship, wherein in the first positional relationship, the storage-member floodgate unit projects upward from the storage-member bottom unit such that the storage-member bottom unit and the storage-member floodgate unit form a storage tank that stores a liquid on the storage-member bottom unit and inside the storage-member floodgate unit, and wherein in the second positional relationship, the storage-member floodgate unit does not project upward from the storage-member bottom unit to allow a liquid existing on the storage-member bottom unit to flow outside the storage-member bottom unit over the storage-member floodgate unit; a plate driving unit configured to move the substrate support unit between an immersion position at which the substrate supported by the substrate support unit is immersed into the liquid stored in the storage tank, and a separation position located above the immersion position, at which the substrate supported by the substrate support unit is separated from the liquid stored in the storage tank; a rotary drive unit configured to rotate the substrate supported by the substrate support unit; a liquid supply unit configured to supply a liquid to the substrate that is being rotated by the rotary drive unit in the separation position; and a cup unit disposed to surround the storage-member bottom unit and the storage-member floodgate unit and to surround the substrate that is supported by the substrate support unit, wherein the cup unit is disposed to receive a liquid having been supplied to the substrate from the liquid supply unit when the liquid supply unit supplies the liquid to the substrate and the storage-member bottom unit and the storage member floodgate unit takes the second positional relationship.