SILICON MICROPHONE WITH SUSPENDED DIAPHRAGM AND SYSTEM WITH THE SAME,申请号WO2014CN80990-传众专利搜索

SILICON MICROPHONE WITH SUSPENDED DIAPHRAGM AND SYSTEM WITH THE SAME

申请公布号：WO2015196468(A1)

申请号：WO2014CN80990

申请日期：2014.06.27

申请公布日期：2015.12.30

申请人：

GOERTEK INC.

发明人：WANG, ZHE

分类号：H04R19/04;B81B7/00

主分类号：H04R19/04

摘要：A silicon microphone with a suspended diaphragm and a system with the same are provided, the microphone comprises: a silicon substrate provided with a back hole therein; a compliant diaphragm disposed above the back hole of the silicon substrate and separated from the silicon substrate; a perforated backplate disposed above the diaphragm with an air gap sandwiched in between; and a precisely defined support mechanism, disposed between the diaphragm and the backplate with one end thereof fixed to the edge of the diaphragm and the other end thereof fixed to the backplate, wherein the diaphragm and the backplate are used to form electrode plates of a variable condenser. The microphone with a suspended diaphragm can improve the repeatability and reproducibility in performance and can reduce the diaphragm stress induced by the substrate.