申请公布号：JP3859181(B2)

申请号：JP19970093072

申请日期：1997.03.27

申请公布日期：2006.12.20

分类号：G03F7/022;G03F7/085;G03F7/039;H01L21/027;H05K3/18

主分类号：G03F7/022

摘要：PROBLEM TO BE SOLVED: To provide a forming method for a pattern, in particular a pattern in which a fine pattern with 10μm line/10μm space such as a liquid crystal panel is required, to obtain excellent reproducibility while preventing discontinuity in lines and a short circuit, and to provide a positive photoresist compsn. for electroless plating having excellent adhesion property with a substrate and good plating resistance to be used for the pattern forming method above described. SOLUTION: A positive photoresist compsn. containing one or more kinds of specified sulfur-contg. org. compds. (such as thiourea, thiophene, thiazole, thionalide and diphenylcarbazide) is applied on a substrate 1, dried, selectively exposed through a mask pattern 3, and developed to remove the exposed part to form a photoresist pattern 4. Then the pattern is subjected to electroless plating to form a conductive pattern 5.

DOCUMENT FEEDING APPARATUS

COLLET CLEANING METHOD AND DIE BONDER

MANUFACTURE OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR MEMORY CIRCUIT

SOLID-STATE ELECTROLYTIC CONDENSER

FIXING DEVICE

MANUFACTURE OF OPHTHALMIC LENSES BY EXCIMER LASER

LOW CIRCUMFERENTIAL VOLTAGE GRADIENT SELF SUPPORTING ELECTRODE FOR SOLID OXIDE FUEL CELLS

COPOLYMERS OF VINYL ACETATE AND ACRYLATES

COMPOSITE SHEET FOR ARTIFICIAL LEATHER AND METHOD FOR ITS PRODUCTION

LITHIUM-LITHIUM NITRIDE ANODE

METHOD AND CIRCUIT FOR IMPROVED HID LAMP MAINTENANCE

TRICYCLIC COMPOUNDS AS TXA2 ANTAGONISTS

GARBAGE PROCESSING DEVICE

BOX WITH A SUPPLEMENTARY RAISABLE PANEL AND OFFSET CREASING LINE HOLES

PROCESS FOR THE PRODUCTION OF A HOLLOW CHAMBER PLATE OF SYNTHETIC MATERIAL

VALVE ASSEMBLY AND FUEL METERING APPARATUS

PROTECTED SOLDER CONNECTION AND METHOD

GAMMA CAMERA DEVICE

COOKING APPARATUS