System and Method for Apodization in a Semiconductor Device Inspection System,申请号US201313760829-传众专利搜索

System and Method for Apodization in a Semiconductor Device Inspection System

申请公布号：US2014016125(A1)

申请号：US201313760829

申请日期：2013.02.06

申请公布日期：2014.01.16

申请人：

KLA-TENCOR CORPORATION;KLA-TENCOR CORPORATION

发明人：SULLIVAN JAMIE M.;JANIK GARY;CUI STEVE;RUNYON REX;WILK DIETER;SHORT STEVE;HAURYLAU MIKHAIL;ZHANG QIANG Q.;CHEN GRACE HSIU-LING;DANEN ROBERT M.;MARTONO SUWIPIN;VERMA SHOBHIT;CAI WENJIAN;BRENDER MEIER

分类号：G01N21/88;G02B27/58

主分类号：G01N21/88

摘要：An inspection system with selectable apodization includes an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system, a selectably configurable apodization device disposed along the optical pathway, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions, and a control system communicatively coupled to the one or more actuation and configured to selectably control apodization of illumination transmitted along the optical pathway by controlling an actuation state of the one or more apodization elements.