FLOATING BODY MEMORY CELL HAVING GATES FAVORING DIFFERENT CONDUCTIVITY TYPE REGIONS
申请公布号:US2014015021(A1)
申请号:US201314028043
申请日期:2013.09.16
申请公布日期:2014.01.16
发明人:CHANG PETER L. D.;AVCI UYGAR E.;KENCKE DAVID;BAN IBRAHIM
分类号:H01L29/78;H01L29/66
主分类号:H01L29/78
摘要:A method for fabricating floating body memory cells (FBCs), and the resultant FBCs where gates favoring different conductivity type regions are used is described. In one embodiment, a p type back gate with a thicker insulation is used with a thinner insulated n type front gate. Processing, which compensates for misalignment, which allows the different oxide and gate materials to be fabricated is described.