条形磁铁、磁靶及磁控溅射设备

申请公布号：CN103668096B

申请号：CN201310739712.0

申请日期：2013.12.26

申请公布日期：2015.08.12

申请人：

京东方科技集团股份有限公司

发明人：李正亮;刘震;丁录科;孙冰;曹占锋;惠官宝

分类号：C23C14/35(2006.01)I

主分类号：C23C14/35(2006.01)I

代理机构：

北京路浩知识产权代理有限公司 11002

代理人：李迪

地址：100015 北京市朝阳区酒仙桥路10号

摘要：本发明涉及磁控溅射技术领域，尤其涉及一种条形磁铁、磁靶及磁控溅射设备，所述条形磁铁在中间区域设有凸起结构。本发明提供的条形磁铁、靶材及磁控溅射设备，通过条形磁铁设有的凸起结构，在采用磁控溅射方式沉积薄膜过程中，为磁控溅射区域提供磁感应强度强弱分布均匀的磁场，确保沉积的薄膜厚度均匀。

主权项：一种条形磁铁，其特征在于，所述条形磁铁在中间区域设有凸起结构，且通过凸起结构为磁控溅射区域提供磁感应强度强弱分布均匀的磁场。

Device and method for degassing water and separating a steam/water mixture into steam and water

RINSE-ADDED FABRIC CONDITIONING COMPOSITION FOR USE WHERE RESIDUAL DETERGENT IS PRESENT

FIREARM'S BOLT FIRING PIN LOCKING SYSTEM

Articulation device for connecting a flap to an aircraft aerodynamic surface

Pneumatic tire

Combustion catalysts and processes for removing organic compounds

Machining apparatus

WHEEL BLOCKING SYSTEM

Improvements in and relating to methods for improving the sputter desposition of metal-sulphur coatings, e.g. molybdenum disulphide coatings and to improved coatings

Device and method for adjusting the orientation of at least one vehicle headlamp

Flame-retardant expanded polyolefins containing carbon black

Semiconductor device

Method for formatting an audio bitstream

Integrated programmable fire pulse generator for inkjet printhead assembly

Rear light

PRINTING USING A PLURALITY OF KINDS OF DOTS HAVING DIFFERENT FORMATION MODES WITH EQUAL AMOUNT OF INK

Dihydropyridinforbindelser med samtidig evne til a blokkere L-type kalsiumkanaler og a inhibere fosfodiesterase type 3 aktivitet

PERSONAL CARE APPARATUS WITH FRICTION REDUCING DISCS

Use as a primer

PHARMACEUTICAL COMPOUNDS