FLUIDIZED BED REACTOR SYSTEMS AND METHODS FOR REDUCING DEPOSITION OF SILICON ON REACTOR WALLS,申请号JP20150021536-传众专利搜索

FLUIDIZED BED REACTOR SYSTEMS AND METHODS FOR REDUCING DEPOSITION OF SILICON ON REACTOR WALLS

申请公布号：JP2015120160(A)

申请号：JP20150021536

申请日期：2015.02.05

申请公布日期：2015.07.02

申请人：

MEMC ELECTRON MATERIALS INC

发明人：MILIND S KULKARNI;PUNEET GUPTA;BALAJI DEVULAPALLI;IBRAHIM JAMEEL;VITHAL REVANKAR;KWASI FOLI

分类号：B01J8/24;C01B33/027

主分类号：B01J8/24

摘要：PROBLEM TO BE SOLVED: To provide reactor systems for producing polycrystalline silicon which limit or reduce the amount of deposits formed on reactor walls.SOLUTION: The present process has the steps of: feeding a first gas to a first gas plenum to introduce it through peripheral openings into a reaction chamber, and passing the first gas through a channel portion and a throttle portion of distribution openings; and introducing a second gas through a second gas plenum and central openings into the reaction chamber, and passing the second gas through the channel portion and the throttle portion of the distribution openings.