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ダブルパス干渉方式エンコーダシステム
申请公布号：JP5714780(B2)
申请号：JP20140541253
申请日期：2012.11.08
申请公布日期：2015.05.07
分类号：G01D5/38;G01B11/02;G01D5/347;G03F9/00;H01L21/027
主分类号：G01D5/38
摘要：<p>An encoder head includes one or more components arranged to: i) direct a first incident beam to the diffractive encoder scale at a first incident angle with respect to the encoder scale; ii) receive a first return beam from the encoder scale at a first return angle, the first return angle being different from the first incident angle; iii) redirect the first return beam to the encoder scale as a second incident beam at a second incident angle; and iv) receive a second return beam back from the encoder scale at a second return angle, the second return angle being different from the second incident angle, in which a difference between the first incident angle and second incident angle is less than a difference between the first incident angle and the first return angle and less than a difference between the second incident angle and the second return angle.</p>