FRINGE SCAN LIGHT RECEPTION MODULE, INTERFERENCE MEASUREMENT TOOL, ENCODER AND INTERFERENCE TYPE DISPLACEMENT MEASUREMENT TOOL,申请号JP20130215183-传众专利搜索

FRINGE SCAN LIGHT RECEPTION MODULE, INTERFERENCE MEASUREMENT TOOL, ENCODER AND INTERFERENCE TYPE DISPLACEMENT MEASUREMENT TOOL

申请公布号：JP2015078861(A)

申请号：JP20130215183

申请日期：2013.10.16

申请公布日期：2015.04.23

申请人：

CANON INC

发明人：ISHIZUKA AKIRA

分类号：G01D5/38;G01B11/00;G01M11/00

主分类号：G01D5/38

摘要：<p>PROBLEM TO BE SOLVED: To provide a fringe scan light reception unit capable of coping with high speed measurement with high accuracy.SOLUTION: Plural light block slits are disposed for each fine areas while varying their transparent phases, and fringes whose position of stripe is moved based on the phase difference of wavefaces between two fluxs are received by the fine light reception elements respectively. Then the fringes received by the elements whose transparent phase is equal is added, and finally the fringes are detected by a light reception module for acquiring required phase difference signals of plural phases, for acquiring plural phase difference signals.</p>