板金製のステージ装置,申请号JP20110124138-传众专利搜索

板金製のステージ装置

申请公布号：JP5695503(B2)

申请号：JP20110124138

申请日期：2011.06.02

申请公布日期：2015.04.08

分类号：G12B5/00;B21D5/01;F16H25/20

主分类号：G12B5/00

摘要：PROBLEM TO BE SOLVED: To propose a stage device capable of achieving thinning without losing reliability. SOLUTION: An XY stage device 1 has such a structure that an X-axis stage plate 3 made of sheet metal to slide in an X-axis direction is mounted on a base plate 2 made of sheet metal and a Y-axis stage plate 4 to slide in a Y-axis direction is mounted on the X-axis stage plate 3. The thin X-axis stage plate 3 and the thin Y-axis stage plate 4 are manufactured by precise sheet metal working using a thin material made of sheet metal, and the strength and accuracy are given to the X-axis stage plate 3 and the Y-axis stage plate 4 made of sheet metal by bending four side sections of peripheries of the stage plates 3, 4 twice to the rear face side and the front face side. Thus, thinning of the XY stage device can be achieved by using components made of sheet metal without losing reliability. COPYRIGHT: (C)2013,JPO&INPIT