EXHAUST GAS TREATMENT METHOD
申请公布号:JP2015051394(A)
申请号:JP20130185284
申请日期:2013.09.06
申请公布日期:2015.03.19
发明人:KITAMURA MORIHIRO;YAMAMOTO TETSUYA
分类号:B01D53/46;B01D53/34;B01D53/68;B01D53/77;F23G7/06
主分类号:B01D53/46
摘要:<p>PROBLEM TO BE SOLVED: To provide an exhaust gas treatment method capable of exhausting gas generated in equipment handling an annular silane compound into air efficiently and safely.SOLUTION: The exhaust gas treatment method is characterized in that, for exhausting gas generated in equipment handling an annular silane compound, the method removes one or more kinds of silane components selected from the group consisting of SiH, SiH, SiH, SiHand the annular silane compound in the gas.</p>
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