一种溢流槽
申请公布号:CN204167272U
申请号:CN201420559404.X
申请日期:2014.09.25
申请公布日期:2015.02.18
发明人:郑淑刚;李朝;赵爱爽
分类号:H01L21/67(2006.01)I;H01L21/02(2006.01)I
主分类号:H01L21/67(2006.01)I
代理人:李海波
地址:055550 河北省邢台市宁晋县晶龙大街267号
摘要:本实用新型涉及一种溢流槽,包括槽体和溢流管,槽体内装有清洗硅片的介质,溢流管连通槽体的顶部;槽体的顶部还安装有吹气管道,吹气管道上有面向槽体内部的吹气口,吹气口的高度不低于液面高度,从吹气口吹出的高压气体能将漂浮在介质上的杂质吹扫到溢流管中;作为优选方案,槽体为长方体结构,包括4个竖直的构成长方体结构的侧壁,吹气管道被固定于槽体上其中一个侧壁的顶部,该侧壁为安装侧壁,溢流管在与安装侧壁相对的侧壁上连通槽体,从吹气口吹出的高压气流的运动方向与杂质跟随介质流动的方向大致相当;本结构让高压气流吹扫杂质,配合介质的溢流将杂质迅速推送进溢流管,避免杂质长时间停留在溢流槽内,导致杂质重新粘附到晶体硅片上。
主权项:一种溢流槽,包括槽体和溢流管,槽体内装有清洗硅片的介质,溢流管连通于槽体的顶部;其特征在于:槽体的顶部还安装有吹气管道,吹气管道上带有面向槽体内部的吹气口,吹气口的高度不低于液面高度,从吹气口吹出的高压气体能将漂浮的杂质吹扫到溢流管中。
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