REFILLABLE AMPOULE WITH PURGE CAPABILITY,申请号EP20120793563-传众专利搜索

REFILLABLE AMPOULE WITH PURGE CAPABILITY

申请公布号：EP2715781(A4)

申请号：EP20120793563

申请日期：2012.05.24

申请公布日期：2014.11.12

申请人：

ADVANCED TECHNOLOGY MATERIALS, INC.

发明人：CHISM, RICHARD, D.;KRELL, ANDY

分类号：H01L21/02;C23C16/44;C23C16/448;C23C16/455;F17C13/04

主分类号：H01L21/02

摘要：A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.