System and method for design of linear motor for vacuum environment,申请号US201113315194-传众专利搜索

System and method for design of linear motor for vacuum environment

申请公布号：US8885148(B2)

申请号：US201113315194

申请日期：2011.12.08

申请公布日期：2014.11.11

申请人：

ASML Holding N.V.

发明人：Zordan Enrico

分类号：G03B27/58;H02K41/02;G03F7/20;H02K9/19;H02K9/22;H02K41/03

主分类号：G03B27/58

代理机构：

Sterne, Kessler, Goldstein & Fox P.L.L.C.

代理人：Sterne, Kessler, Goldstein & Fox P.L.L.C.

地址：Veldhoven NL

摘要：A linear motor for vacuum environment includes a core and a housing. The core includes a plurality of cooling plates and a plurality of electrical coils sandwiched between the plurality of cooling plates. The core further includes a plurality of thermally conductive epoxy layers positioned between the plurality of electrical coils and the plurality of cooling plates, and a plurality of shims located between the plurality of electrical coils and the plurality of cooling plates to determine a distance between the plurality of electrical coils and the plurality of cooling plates. The core is assembled and tested independently and before being assembled in the housing. The housing encloses the core and includes a body, a plurality of feed throughs, and a lid.

主权项：1. A system comprising: a core comprising: a plurality of cooling plates;a plurality of electrical coils sandwiched between the plurality of cooling plates;a plurality of thermally conductive epoxy layers positioned between the plurality of electrical coils and the plurality of cooling plates; anda plurality of shims located between the plurality of electrical coils and the plurality of cooling plates to determine a distance therebetween,wherein the core is configured to be tested before assembling with a housing; and the housing configured to enclose the core, the housing comprising a body, a plurality of feed throughs, and a lid.