图案形成装置及图案形成方法、以及对准装置及对准方法;AN ELECTRIC CIRCUIT BOARD USING METAL PLATES AND PACKAGING MODULE THEREOF
申请公布号:TW201433887
申请号:TW103106157
申请日期:2014.02.25
申请公布日期:2014.09.01
发明人:川越理史;増市干雄;上野博之;上野美佳;谷口和;正司和大;芝藤弥生;田中哲夫;陶山武史
分类号:G03F9/00(2006.01);G03F7/00(2006.01)
主分类号:G03F9/00(2006.01)
代理人:<name>叶璟宗</name><name>郑婷文</name><name>詹富闵</name>
地址: DAINIPPON SCREEN MFG. CO., LTD. 日本
摘要:本发明的图案形成装置中,使承载图案的承载体与被转印图案的被转印体对向配置。基于拍摄承载体的外缘的至少一部分而得的结果,使第一保持设备移动而将承载体定位在第一目标位置。基于拍摄被转印体的外缘中的至少一部分而得的结果,使第二保持设备移动而将被转印体定位在规定的第二目标位置。拍摄形成在承载体的第一对准标记及形成在被转印体的第二对准标记,基于其拍摄结果使第一保持设备及第二保持设备中的至少一者移动,对承载体与被转印体进行位置对准。
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