申请公布号：JP5498640(B2)

申请号：JP20050299884

申请日期：2005.10.14

申请公布日期：2014.05.21

分类号：H01L21/205;C23C16/44

主分类号：H01L21/205

摘要：PROBLEM TO BE SOLVED: To provide a cleaning method and a cleaning apparatus which allow a worker to work safely without causing damage or corrosion of a contaminated component, when various components of a semiconductor manufacturing apparatus are contaminated with a contaminated matter made of a nitride in a process of manufacturing a nitride semiconductor. SOLUTION: A contaminated component is removed from the apparatus for manufacturing the semiconductor and is put in a reaction chamber 1. A heater 5 is actuated to heat the contaminated component in the reaction chamber 1 to 500 to 1000°C. Then, a first cleaning gas composed of a chlorine gas and a dilution gas is lead into the reaction chamber 1 from a first cleaning gas lead-in pipe 2. This causes a contaminated matter to react with the chlorine gas contained in the first cleaning gas to produce a reactant in the form of a volatile gas, which is discharged from an exhaust gas pipe 4 together with the cleaning gas. Subsequently, a second cleaning gas containing a hydrogen gas is led into the reaction chamber 1 from a second cleaning gas lead-in pipe 3 to cause a chlorine material remaining on the component to react with the hydrogen gas to turn the chlorinous material into a hydrogen chloride gas, etc., which is eliminated. COPYRIGHT: (C)2007,JPO&INPIT

Vehicle i.e. motor vehicle, has articulation comprising inner armature partially surrounded by outer armature and connected to outer armature by elastomer body, where inner or outer armature is directly supported against body shell

Device for indicating presence of post in letter box, has triangular folding shaped rigid part provided with pinching system fixed on offset of shutter of letter box, and flexible part fixed mechanically with rigid part

Construction system for creating modular structure i.e. shelf board, of exhibition stall, has lateral panels with connection element, and lower panel with lateral edges including another connection element

Structure for filtering exhaust gas containing soot/solid particles in e.g. diesel engine, has filtering elements connected by joint cement, where structure satisfies specific equation comprising parameters such as walls apparent porosity

Strip e.g. film, scanning device, has units for guiding strip along path so that strip forms roll composed of coils that are offset to extend side by side, where one strand of one coil is located at side of another strand of next coil

PROCEDE DE PREPARATION DE DITHIOCARBAMATES NOTAMMENT A PARTIR DE POLYOLS DU TYPE GLYCEROL.

DISPOSITIF POUR LA CUISSON ET LE SERVICE D'UNE PREPARATION ALIMENTAIRE

COPOLYMERE ETHYLENIQUE A MOTIFS PEG, CATIONIQUE ET ANIONIQUE, COMPOSITION COSMETIQUE LE COMPRENANT ET PROCEDE DE TRAITEMENT

RACCORD ENTRE UN COFFRE TUNNEL DE VOLET ROULANT ET UNE TRAVERSE DE MENUISERIE

METHOD AND SYSTEM OF ONE-TO-ONE AND GROUP COMMUNICATION SIMULTANEOUSLY IN WIRELESS IP NETWORK

PROCEDE DE CONVERSION A/N ET DETECTEUR D'IMAGE RADIOGRAPHIQUE ET APPAREIL DE RADIOGRAPHIE

COMPOSITION DEODORANTE A BASE DE PEPTIDES ANTIMICROBIENS ET PROCEDE DE TRAITEMENT DES ODEURS CORPORELLES

REVETEMENT BARRIERE DEPOSE PAR PLASMA COMPRENANT AU MOINS TROIS COUCHES, PROCEDE D'OBTENTION D'UN TEL REVETEMENT ET RECIPIENT REVETU D'UN TEL REVETEMENT

ENTREE D'AIR D'UNE NACELLE D'AERONEF INTEGRANT DES MOYENS D'INJECTION EN AIR CHAUD POUR LE TRAITEMENT DU GIVRE OPTIMISES

TUYAU POUR COMBUSTIBLES

PROCEDIMIENTO Y DISPOSITIVO PARA LA FABRICACION Y EL TRATAMIENTO DE GRANOS DE GRANULADO.

RADIADOR ELECTRICO

TAPA PARA RECIPIENTE EN FORMA DE COPA.

SISTEMAS Y PROCEDIMIENTOS PARA CREAR SECUENCIAS DE ILUMINACION.

BARCO CON UN DISPOSITIVO DE SEPARACION DE CONTAMINANTES.