DEPOSITING APPARATUS AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DIODE DISPLAY USING THE SAME

申请公布号：KR20140045809(A)

申请号：KR20120112027

申请日期：2012.10.09

申请公布日期：2014.04.17

申请人：

SAMSUNG DISPLAY CO., LTD.

发明人：LEE, SANG SHIN

分类号：H01L51/56;C23C14/24

主分类号：H01L51/56

摘要：<p>A deposition apparatus according to the present invention comprises: a deposition source for accommodating a deposition material; and a plurality of spraying nozzles which is arranged in a first direction on one side of the deposition source and sprays the deposition material to an opposing substrate. The deposition source is separated into a central region and outer regions of both ends of the central region relative to the first direction. An end surface of a first spraying nozzle disposed in each outer region makes a first inclination angle with a surface of the substrate in the first direction and faces towards the outside of the deposition source. According to embodiments of the present invention, a shadow phenomenon that the deposition material penetrates between a mask for deposition and the substrate is suppressed, deposition margin is reduced, and deposition uniformity and efficiency can be increased by increasing an incident angle of the deposition material incident on the substrate. Accordingly, high definition of an organic light emitting display device can be easily implemented.</p>

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