COPPER OXIDE ETCHANT AND ETCHING METHOD USING THE SAME,申请号US201314098109-传众专利搜索

COPPER OXIDE ETCHANT AND ETCHING METHOD USING THE SAME

申请公布号：US2014091058(A1)

申请号：US201314098109

申请日期：2013.12.05

申请公布日期：2014.04.03

申请人：

ASAHI KASEI E-MATERIALS CORPORATION

发明人：NAKAGAWA NORIKIYO;NAKATA TAKUTO;MITAMURA YOSHIMICHI

分类号：C09K13/00

主分类号：C09K13/00

摘要：In order to provide a copper oxide etchant and an etching method using the same capable of selectively etching exposure/non-exposure portions when laser light exposure is performed by using copper oxide as a thermal-reactive resist material, the copper oxide etchant for selectively etching copper oxides having different oxidation numbers in a copper oxide-containing layer containing the copper oxide as a main component contains at least a chelating agent or salts thereof.