NOZZLE ARRAYS
申请公布号:WO2014046661(A1)
申请号:WO2012US56358
申请日期:2012.09.20
申请公布日期:2014.03.27
发明人:LEBRATO, ALBERTO BORREGO;FERNANDEZ, DAVID CHANCLON;NEBREDA, MARTIN URRUTIA
分类号:B41J2/14;H01L21/302
主分类号:B41J2/14
摘要:Disclosed are devices and methods where a distance between nozzle arrays is equal to a substrate advance distance corresponding to at least one complete turn of a rotating drive body.