基于钽酸锂热释电材料的太赫兹线列探测器及其制备方法
申请公布号:CN103606586A
申请号:CN201310636463.2
申请日期:2013.12.03
申请公布日期:2014.02.26
发明人:黎威志;王军;刘子骥;王洪;卢菲;黄泽华
分类号:H01L31/08(2006.01)I;H01L31/00(2006.01)I
主分类号:H01L31/08(2006.01)I
代理人:徐丰;杨保刚
地址:611731 四川省成都市高新区(西区)西源大道2006号
摘要:本发明公开了一种基于钽酸锂热释电材料的太赫兹线列探测器及其制备方法,首先从钽酸锂晶圆片上切片减薄获得线列探测器所需晶片尺寸,然后在晶片背面制备条形电极,形成探测器下电极,该电极亦为线列各单元公用电极;然后在晶片正面形成各单元所需上电极图形;然后结合光刻形成单元隔离槽。最后在下电极上制备太赫兹吸收层。至此得到线列探测器敏感元结构。该结构结合MEMS(微机电系统)加工技术,可获得良好的热隔离效果,且加工工艺相对于微桥结构太赫兹探测器较为简单。
主权项:基于钽酸锂热释电材料的太赫兹线列探测器,其特征在于:它从下到上依次为:太赫兹吸收层、下电极、钽酸锂晶圆片层、上电极,所述上电极个数与线列单元数目一致,各上电极之间设置有单元隔离槽。
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