Optical waveguide manufacturing method,申请号EP20090162175-传众专利搜索

Optical waveguide manufacturing method

申请公布号：EP2133716(A3)

申请号：EP20090162175

申请日期：2009.06.08

申请公布日期：2014.01.15

申请人：

NITTO DENKO CORPORATION

发明人：SHIMIZU, YUSUKE

分类号：G02B6/138;G02B6/122

主分类号：G02B6/138

摘要：An optical waveguide manufacturing method which obviates a developing step and stably provides greater differences in refractive index between a core and cladding layers. A core formation photosensitive resin layer is formed on a surface of an under-cladding layer, and then exposed in a predetermined pattern. A core is formed which is defined by an exposed portion of the core formation photosensitive resin layer. Surfaces of the exposed portion and an unexposed portion of the core formation photosensitive resin layer are covered with an over-cladding layer formation photosensitive resin layer. The two photosensitive resin layers are heated, whereby a resin of the unexposed portion of the core formation photosensitive resin layer and a resin of the over-cladding layer formation photosensitive resin layer are melt-mixed together to form a mixture layer. Then, the mixture layer is exposed, whereby a third cladding layer is formed defined by the exposed mixture layer.