Method of making and apparatus having windowless polishing pad and protected fiber

申请公布号：US8465342(B2)

申请号：US201213448299

申请日期：2012.04.16

申请公布日期：2013.06.18

申请人：

ZHANG JIMIN;DUBOUST ALAIN;BENNETT DOYLE E.;APPLIED MATERIALS, INC.

发明人：ZHANG JIMIN;DUBOUST ALAIN;BENNETT DOYLE E.

分类号：B24B1/00

主分类号：B24B1/00

摘要：A polishing system includes a polishing pad with an aperture that extends through all layers of the polishing pad and a light transmissive film positioned on top of a light-generating or light-guiding element of an optical monitoring system.

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