IMPRINT APPARATUS, MANUFACTURING METHOD FOR ARTICLE USING THE SAME, AND IMPRINT METHOD,申请号US201213683095-传众专利搜索

IMPRINT APPARATUS, MANUFACTURING METHOD FOR ARTICLE USING THE SAME, AND IMPRINT METHOD

申请公布号：US2013134630(A1)

申请号：US201213683095

申请日期：2012.11.21

申请公布日期：2013.05.30

申请人：

CANON KABUSHIKI KAISHA;CANON KABUSHIKI KAISHA

发明人：MIYATA NAOKI

分类号：B29C59/02

主分类号：B29C59/02

摘要：An imprint apparatus includes a holding unit configured to hold the mold by use of a suction unit including a plurality of suction force generating portions; a suction force adjusting unit configured to enable adjustment of a suction force by the plurality of suction force generating portions; and a shape correcting unit configured to align a shape of a pattern region of the mold with a shape of a substrate-side pattern region of the substrate by applying force to the mold. In the case of applying force to the mold by use of the shape correcting unit, the suction force adjusting unit configures a predetermined region of a suction surface applying suction to the mold as a suction region, and adjusts the suction force of the plurality of suction force generating portions so that the suction force on the other region is smaller than the suction force on the suction region.