SYSTEM AND METHOD FOR PROVIDING A MICRON-SCALE CONTINUOUS LIQUID JET
申请公布号:WO2013075081(A2)
申请号:WO2012US65788
申请日期:2012.11.19
申请公布日期:2013.05.23
发明人:DOAK, R., BRUCE;SPENCE, JOHN;WEIERSTALL, UWE
分类号:B05B7/04
主分类号:B05B7/04
摘要:A nozzle for producing a liquid jet a fluid, methods using the nozzle, and an injector comprising the nozzle of the invention for providing the liquid jet of a fluid to a vacuum system are described.
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