Electromagnetic radiation detector and method of manufacturing such a detector

申请公布号：EP2019301(B1)

申请号：EP20080305392

申请日期：2008.07.10

申请公布日期：2013.05.01

申请人：

ULIS

发明人：VILAIN, MICHEL

分类号：G01J5/20;B81B3/00;H01L27/146

主分类号：G01J5/20

摘要：<p>The detector has a structural substrate and a detection element comprising a membrane (16) sensitive to electromagnetic radiation and suspended above the substrate. A distance between the membrane and the substrate is variable, and has a predefined spatial distribution for minimizing rapid variations of a response of the detector to the radiation in a predefined wavelength range. The membrane comprises a bolometric material e.g. metal oxide, sensitive to a temperature variation resulting from exposure to infrared radiation. An independent claim is also included for a method for manufacturing an electromagnetic radiation detector.</p>

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