Device to detect and measure static electric charge,申请号US20100873531-传众专利搜索

Device to detect and measure static electric charge

申请公布号：US8373232(B2)

申请号：US20100873531

申请日期：2010.09.01

申请公布日期：2013.02.12

申请人：

MICRODUL AG;SOLO DE ZALDIVAR JOSE;POOLE PHILIP JOHN

发明人：SOLO DE ZALDIVAR JOSE;POOLE PHILIP JOHN

分类号：H01L23/62;G01R29/12

主分类号：H01L23/62

摘要：A device (10) to detect and measure static electric charge (q) on an object (100) being positioned in a distance (r.) from an input electrode (11) of the device (10) comprises at least one MOS field transistor (20). The input electrode (11) is connected with the gate electrode (21) of the MOS-FET (20) to detect said electrical charge. The MOS-FET (20) can comprise a gate oxide layer underneath the gate (21) and over the source (22) and drain (23) areas having a sufficient thickness to allow the MOS field transistor (20) to withstand several kilovolts (kV) of voltage and to avoid the loss of charges by tunnel effect due to the high potential of the gate electrode during ESD events.