SEMICONDUCTOR DEVICE
申请公布号:JP2012253485(A)
申请号:JP20110123232
申请日期:2011.06.01
申请公布日期:2012.12.20
发明人:TERUI AKIRA;YANAGISAWA KENJI
分类号:H03K19/0175;H01L21/82;H01L21/822;H01L27/04;H03K19/00
主分类号:H03K19/0175
摘要:<P>PROBLEM TO BE SOLVED: To provide a semiconductor device that performs the evaluation of a calibration operation with ease and high accuracy in a wafer test. <P>SOLUTION: A semiconductor device comprises a replica buffer (131) that drives a calibration terminal ZQ and a variable impedance circuit (170) in which impedance to be a target when output impedance of the replica buffer is caused to change is set and is connected to the calibration terminal ZQ. <P>COPYRIGHT: (C)2013,JPO&INPIT