NANOPORE FABRICATION AND APPLICATIONS THEREOF
申请公布号:WO2012170499(A2)
申请号:WO2012US41058
申请日期:2012.06.06
申请公布日期:2012.12.13
发明人:HALL, ADAM, R.;YANG, JIJIN;FERRANTI, DAVID, C.;SANFORD, COLIN, A.
分类号:B81C1/00
主分类号:B81C1/00
摘要:In one aspect, methods of nanopore formation in solid state membranes are described herein, In some embodiments, a method of forming an aperture comprises providing at least one solid state membrane in a chamber, selecting a first dose of ions sufficient to provide a first aperture of predetermined diameter through the membrane and exposing a surface of the membrane at a first location to the first dose of ions in a focused ion beam having a focal point of diameter less than or equal to about 1 nm to remove material from the membrane at the first location thereby providing the first aperture having the predetermined diameter or substantially the predetermined diameter.
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