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VACUUM PUMP

申请公布号:WO2012165646(A1)

申请号:WO2012JP64347

申请日期:2012.05.29

申请公布日期:2012.12.06

申请人:
EBARA CORPORATION;KUDARA, SOICHI;NAGAYAMA, MASAMI

发明人:KUDARA, SOICHI;NAGAYAMA, MASAMI

分类号:F04C25/02;F04C18/18;F04C23/00

主分类号:F04C25/02

摘要:<p>A vacuum pump (10) has a pump casing (54) including pump chambers (50a-50f) held in fluid communication with each other and arrayed in a longitudinal direction thereof, an inlet port (52a) and an outlet port (52b), a rotational shaft (58) rotatably supported at opposite ends thereof and extending in the longitudinal direction of the pump casing (54), and rotors (60a-60f) housed in the pump chambers (50a-50f) and coupled to the rotational shaft (58). The pump casing (54) includes a first thermally conductive member (72) extending parallel to the rotational shafts (58) substantially the full length of the pump casing (54) in the longitudinal direction thereof, and a second thermally conductive member (74) positioned near an end of the first thermally conductive member (72) at the outlet port (52b) and extending in a transverse direction of the pump casing (54).</p>

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