Apparatus for extracting gaseous specimens to be measured from a production process and system
申请公布号:US8318097(B2)
申请号:US20090581585
申请日期:2009.10.19
申请公布日期:2012.11.27
发明人:STOECKLINGER ROBERT
分类号:G01N33/00
主分类号:G01N33/00
摘要:An apparatus and a system for extracting gaseous specimens to be measured, preferably during the production of polycrystalline silicon, are disclosed. The apparatus according to the invention is a flange-like device (80), which is placed between each of the at least two pipe sections (11a, 11b, 21a, 21b, 41a, 41b) of the outlet pipes (11, 21, 41).