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Apparatus for extracting gaseous specimens to be measured from a production process and system

申请公布号:US8318097(B2)

申请号:US20090581585

申请日期:2009.10.19

申请公布日期:2012.11.27

申请人:
STOECKLINGER ROBERT;G+R TECHNOLOGY GROUP AG

发明人:STOECKLINGER ROBERT

分类号:G01N33/00

主分类号:G01N33/00

摘要:An apparatus and a system for extracting gaseous specimens to be measured, preferably during the production of polycrystalline silicon, are disclosed. The apparatus according to the invention is a flange-like device (80), which is placed between each of the at least two pipe sections (11a, 11b, 21a, 21b, 41a, 41b) of the outlet pipes (11, 21, 41).

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