故障部位显示用的故障分析系统以及故障部位表示方法
申请公布号:TWI370256
申请号:TW094118700
申请日期:2005.06.07
申请公布日期:2012.08.11
发明人:长野克史;小川秀一郎
分类号:G01R31/26;H01L21/66
主分类号:G01R31/26
代理人:詹铭文 台北市中正区罗斯福路2段100号7楼之1;萧锡清 台北市中正区罗斯福路2段100号7楼之1
地址:日本
摘要:一种半导体装置的故障部位显示用的故障分析系统具备:电路位置储存部,其储存着半导体装置所含有的每个电路中半导体装置之物理位置;故障电路资讯取得部,其取得半导体装置所含有的故障电路的资讯;以及显示部,其在半导体装置的布局上以物理位置所造成的不同颜色来显示各故障电路。故障电路资讯取得部取得半导体装置所含有的故障电路的故障分类,显示部可在含有”多个半导体装置的布局”之晶圆的布局上以物理位置和故障分类所造成的不同颜色来显示各故障电路。
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