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Wavefront measurement apparatus

申请公布号:EP2479532(A1)

申请号:EP20110000436

申请日期:2011.01.20

申请公布日期:2012.07.25

申请人:
OLYMPUS CORPORATION

发明人:MURAYAMA, YOSHIAKI

分类号:G01B9/02;G01B9/04;G01J9/02

主分类号:G01B9/02

摘要:<p>A wavefront measurement apparatus includes a light source that emits a light beam; a light splitting unit that splits the light beam emitted from the light source into an object light beam and a reference light beam; an objective lens that converges the object light beam at a predetermined position of a test object; a light combining unit that superimposes the object light beam returning from the test object and the reference light beam; a light deflecting unit that guides the object light beam returning from the test object towards the light combining unit; an imaging unit that captures an image of an interference pattern formed by combined wavefronts; and a light quantity adjusting filter that adjusts a light quantity, and that is arranged in a optical path between the light deflecting unit and the light combining unit that allows only the transmission of the object light beam from the test object.</p>

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