DEFECT INSPECTION METHOD, WEAK LIGHT DETECTION METHOD AND WEAK LIGHT DETECTOR,申请号JP20100244915-传众专利搜索

DEFECT INSPECTION METHOD, WEAK LIGHT DETECTION METHOD AND WEAK LIGHT DETECTOR

申请公布号：JP2012098103(A)

申请号：JP20100244915

申请日期：2010.11.01

申请公布日期：2012.05.24

申请人：

HITACHI HIGH-TECHNOLOGIES CORP

发明人：URANO YUTA;HONDA TOSHIFUMI;JINGU TAKAHIRO

分类号：G01N21/956;G01B11/30;G01J1/02;G01J1/04;G01J1/42;H01L21/66

主分类号：G01N21/956

摘要：<P>PROBLEM TO BE SOLVED: To achieve detection of a fine defect, highly accurate measurement of the size of the detected defect, and so on. <P>SOLUTION: A defect inspection method includes: an illumination light adjustment step for adjusting light emitted from a light source; an illumination intensity distribution control step for forming a light beam obtained by the illumination light adjustment step as a desired illumination intensity distribution; a sample scanning step for displacing a sample in a direction substantially vertical to a longitudinal direction of the illumination intensity distribution; a scattered light detection step for counting the number of photons of scattered light emitted from each of a plurality of small areas in an area irradiated with the illumination light and outputting a plurality of scattered light detection signals corresponding to the counted number; a defect determination step for determining the existence of a defect by processing the plurality of scattered light detection signals; a defect size determination step for determining the size of a defect in each place determined as the defect; and a display step for displaying the position on the surface of the sample and the size of the defect in each place determined as the defect. <P>COPYRIGHT: (C)2012,JPO&INPIT