SUBSTRATE DETECT APPARATUS

申请公布号：KR20120048065(A)

申请号：KR20100109481

申请日期：2010.11.05

申请公布日期：2012.05.15

申请人：

SEO, HYUNG JU

发明人：SEO, HYUNG JU

分类号：H01L21/677;B65G49/06;G01L13/00;H01L21/68

主分类号：H01L21/677

摘要：PURPOSE: A substrate sensing apparatus is provided to be installed and used for a long time in poor processing surroundings and to accord with a clean process by indirectly sensing a substrate. CONSTITUTION: A pressure generator(100) comprises a pressure generating part(101) which generates pressure through interaction of fluid. A manometer(130) is connected with the pressure generator and senses pressure change of the pressure generating part. A fluid spray(200) is closely installed to one side of a substrate which is transferred. A valve(220) controls fluid sprayed from the fluid spray. A regulator(230) controls pressure of the fluid flowing in the fluid spray. A transferring roller transfers the substrate.

ARTICULATED BALL JOINT IN PARTICULAR FOR EXTERNALLY MOUNTED REAR-VIEW MIRROR

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UNIDIRECTIONAL YELDABLE COUPLING OF SPRING-AND-FRICTION TYPE MOUNTED ON A SHAFT BEING JOURNALLED IN SELF-ALIGNING MANNER

METHOD OF AND APPARATUS FOR COUNTERACTING SELF-EXCITED VIBRATIONS OCCURING DURING MACHINING OPERATIONS

MEASURING FLAT SPRING PROVIDED WITH STRAIN GAUGES

NEGATIVE CHARGE GENERATOR

ELASTOMERIC LAMINATED PRODUCT

CONTROL OF PRINTER

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NOVEL ANTIBIOTICS

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DRIVE CONTROL FOR A TRANSPORTATION SYSTEM, ESPECIALLY AN ELEVATOR

MICROWAVE ALCOHOL FUEL SENSOR

HIGH-TENSION THYRISTOR VALVES WITH BREAK-OVER DIODES FOR EMERGENCY FIRING