Contrast-based resolution enhancement for photolithographic processing

申请公布号：US8108806(B2)

申请号：US20090501349

申请日期：2009.07.10

申请公布日期：2012.01.31

申请人：

ROBLES JUAN ANDRES TORRES;GRANIK YURI;MENTOR GRAPHICS CORPORATION

发明人：ROBLES JUAN ANDRES TORRES;GRANIK YURI

分类号：G06F17/50;G03C5/00;G03F1/14;G06G7/62;G06K9/00

主分类号：G06F17/50

摘要：A contrast-based resolution enhancing technology (RET) determines a distribution of contrast values for edge fragments in a design layout or portion thereof. Resolution enhancement is applied to the edge fragments in a way that increases the number of edge fragments having a contrast value that exceeds a predetermined threshold.

LEVEL ADJUSTMENT SYSTEM

METHOD AND DEVICE FOR MAKING STRUCTURAL TOPOGRAM OF SURFACE LAYER OF POLYCRYSTALLINE PIECE

DETECTOR OF QUADRATURE TYPE

AN ELLIPTICALLOSCILLATION TYPE OSCILLATOR

GAS COCK

DEVICE FOR PICKING UP SAMPLE OF MOLTEN METAL

LOW ROTATION AUTOMATIC SCREW DRIVER

DEVICE FOR INDICATING AMOUNT OF INPUT MONEY IN SLOT MACHINE

DEVICE FOR REMOVING FILM FROM CASSETTE

REPRODUCER

AUTOMATIC TAPE CUTTING DEVICE

COLOR SIGNAL PROCESSOR MEANS USING MULTICOLOR LASER SEQUENCE OPERATION

POSITION DETECTION SYSTEM FOR SEMICONDUCTOR CHIP

METHOD OF MEASURING SPEED AND*OR TEMPERATURE OF EXHAUST GAS

AZIMUTH DETECTOR FOR MOVING BODY SUCH AS VESSEL

SUPERSONIC DETECTION AND INDICATION DEVICE

DISPLAY UNIT FOR DAY OF WEEK

LEAD FRAME FOR SEMICONDUCTOR DEVICE

PROCESSING SYSTEM FOR MICROINSTRUCTION INTERRUPTION

MICROPROGRAM CONTROLLER