至处于真空状态之装置的蒸汽传送

申请公布号：TWI352610

申请号：TW096121254

申请日期：2007.06.12

申请公布日期：2011.11.21

申请人：

山米奎普公司 美國

发明人：道格拉斯Ｒ　亚当斯;法兰克　辛可来尔;布蓝特Ｍ　古柏提诺

分类号：B01D1/26

主分类号：B01D1/26

代理人：陈长文 台北市松山区敦化北路201号7楼

地址：美国

主权项：一种蒸汽传送系统，其包含一高真空腔室、一可移除地安装于该高真空腔室内之蒸汽接收装置及一界定一蒸汽流径的流动界面装置，该流动界面装置包含：一定位于该真空腔室外侧之流径界定部分；及一自该外侧突出至该高真空腔室中之流径界定传送延伸部分，该传送延伸部分具有一外部，该外部经密封至该高真空腔室的一壁，该高真空腔室外侧之该流径的局部经构造以将蒸汽自一蒸汽源运输至该传送延伸部分；及一可分离流动连接部，该可分离流动连接部在该高真空腔室内介于该传送延伸部分与一与该可移除蒸汽接收装置相关联之入口通路间，该系统使在该连接处之任何泄漏能够进入该真空腔室内的真空。

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