LIGHT FLUX CONVERSION ELEMENT, ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND EXPOSURE METHOD,申请号JP20110144669-传众专利搜索

LIGHT FLUX CONVERSION ELEMENT, ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND EXPOSURE METHOD

申请公布号：JP2011233911(A)

申请号：JP20110144669

申请日期：2011.06.29

申请公布日期：2011.11.17

申请人：

NIKON CORP

发明人：TOYODA MITSUNORI

分类号：H01L21/027;G02B19/00;G02B27/00;G02B27/28;G02B27/44;G03F7/20

主分类号：H01L21/027

摘要：<P>PROBLEM TO BE SOLVED: To provide an illumination optical device capable of forming annular illumination pupil distribution in a circumferential polarization state while suppressing light quantity loss to an excellent level. <P>SOLUTION: The illumination optical device comprises a light flux conversion element (50) to form an annular light intensity distribution on a predetermined plane based on an incident luminous flux. The light flux conversion element formed from an optical material having optical rotation comprises: a first basic element (50 A) to form a first arcuate area distribution of the annular light intensity distribution based on the incident luminous flux; a second basic element (50B) to form a second arcuate area distribution; a third basic element (50 C) to form a third arcuate area distribution; and a fourth basic element (50 D) to form a fourth arcuate area distribution. Each basic element has thickness different to each other along a light transmission direction. <P>COPYRIGHT: (C)2012,JPO&INPIT