Display device and electronic device having the display device, and method for manufacturing thereof,申请号US20080222259-传众专利搜索

Display device and electronic device having the display device, and method for manufacturing thereof

申请公布号：US8013338(B2)

申请号：US20080222259

申请日期：2008.08.06

申请公布日期：2011.09.06

申请人：

SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

发明人：KOBAYASHI SATOSHI;MIYAGUCHI ATSUSHI;MORIYA YOSHITAKA;KUROKAWA YOSHIYUKI;KAWAE DAISUKE

分类号：H01L29/04;H01L21/336;H01L29/786

主分类号：H01L29/04

摘要：To provide a display device including a thin film transistor in which high electric characteristics and reduction in off-current can be achieved. The display device having a thin film transistor includes a substrate, a gate electrode provided over the substrate, a gate insulating film provided over the gate electrode, a microcrystalline semiconductor film provided over the gate electrode with the gate insulating film interposed therebetween, a channel protection layer which is provided over and in contact with the microcrystalline semiconductor film, an amorphous semiconductor film provided over the gate insulating film and on a side surface of the microcrystalline semiconductor film and the channel protection layer, an impurity semiconductor layer provided over the amorphous semiconductor film, and a source electrode and a drain electrode provided over and in contact with the impurity semiconductor layer. The thickness of the amorphous semiconductor film is larger than that of the microcrystalline semiconductor film.