COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS FOR CLASSIFYING DEFECTS DETECTED IN A MEMORY DEVICE AREA ON A WAFER
申请公布号:US2011187848(A1)
申请号:US200913056623
申请日期:2009.07.28
申请公布日期:2011.08.04
发明人:CHOI SUNYONG;PAE YEONHO;CHANG ELLIS
分类号:H04N7/18;G06K9/00
主分类号:H04N7/18
摘要:Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer are provided.