SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION
申请公布号:US2011180721(A1)
申请号:US201113082333
申请日期:2011.04.07
申请公布日期:2011.07.28
发明人:STEENBRINK STIJN WILLEM HERMAN KAREL;KRUIT PIETER
分类号:H01J3/14;H01J1/28;H01T23/00
主分类号:H01J3/14
摘要:A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.
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