MEMS accelerometer with magnetic force rebalance,申请号EP20100163017-传众专利搜索

MEMS accelerometer with magnetic force rebalance

申请公布号：EP2259077(B1)

申请号：EP20100163017

申请日期：2010.05.17

申请公布日期：2011.07.06

申请人：

HONEYWELL INTERNATIONAL INC.

发明人：DWYER, PAUL W.;ROEHNELT, RYAN

分类号：G01P15/08;G01P15/125;G01P15/13

主分类号：G01P15/08

摘要：<p>A translational, Micro-Electro-Mechanical System (MEMS) accelerometer device (25) with precisely formed pole pieces (28, 24) to guide magnetic flux through a coil (44) in a MEMS device layer (94). An example device includes a device layer, a magnetic return path component (84) attached to a first side of the device layer, and a magnet unit (104) attached to a second side of the device layer. The device layer includes a proof mass (32) with electrically conductive trace and frame components. The magnet unit includes two magnetically conductive posts (formed of a ferrous material) located proximate to the trace, a base section formed of the same material as the posts, a non-magnetically conductive post (86) (formed of a glass substrate) connected between the conductive posts, and a magnet attached to the non-magnetically conductive post within a cavity formed in the base section between the two magnetically conductive posts.</p>